Semiconductor Device

ABSTRACT

A semiconductor device includes an active fin on a substrate, a device isolation film covering a lower portion of the active fin, a gate structure covering the active fin and the device isolation film, and a gate spacer on a side wall of the gate structure, wherein a side wall of the gate structure disposed on the device isolation film is inclined at a uniform inclination from a point higher than a half of a height of the gate structure to a bottom of the gate structure, and an inner side wall of the gate spacer on the device isolation film is inclined at a uniform inclination from a point higher than a half of a height of the gate spacer to a bottom of the gate spacer while forming an acute angle with a bottom surface of the gate spacer.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to Korean Patent Application No.10-2017-0027698 filed on Mar. 3, 2017 in the Korean IntellectualProperty Office, the disclosure of which is incorporated herein byreference in its entirety.

FIELD

The present inventive concept relates to a semiconductor device.

BACKGROUND

As the degree of integration of semiconductor chips increases, the sizeof semiconductor devices becomes smaller. To overcome limitations ofdevice characteristics (for example, short-channel effect, and the like)due to a reduction in size of semiconductor devices, a semiconductordevice including a fin field effect transistor (FinFET), having achannel with a three-dimensional structure, has been proposed.

SUMMARY

An aspect of the present inventive concept may provide a semiconductordevice having excellent electrical properties and a method ofmanufacturing the same.

According to an aspect of the present inventive concept, a semiconductordevice includes an active fin extended in a first direction on asubstrate, a device isolation film disposed on the substrate whilecovering a lower portion of the active fin, a gate structure extended ina second direction intersecting the first direction while covering theactive fin and the device isolation film, and a gate spacer disposed ona side wall of the gate structure, wherein the gate structure disposedon the device isolation film has a width of a lower portion narrowerthan a width of an upper portion, a side wall of the gate structuredisposed on the device isolation film is inclined at a uniforminclination from a point higher than a half of a height of the gatestructure to a bottom of the gate structure, and an inner side wall ofthe gate spacer disposed on the device isolation film is disposed to beadjacent to the gate structure, and is inclined at a uniform inclinationfrom a point higher than a half of a height of the gate spacer to abottom of the gate spacer while forming an acute angle with a bottomsurface of the gate spacer.

According to an aspect of the present inventive concept, a semiconductordevice includes a substrate including a first region and a secondregion, a first active fin disposed on the first region of thesubstrate, a first device isolation film covering a lower portion of thefirst active fin, a first gate structure disposed on the first activefin and the first device isolation film, a first gate spacer disposed ona side wall of the first gate structure, a second active fin disposed onthe second region of the substrate, a second device isolation filmcovering a lower portion of the second active fin, a second gatestructure disposed on the second active fin and the second deviceisolation film, and a second gate spacer disposed on a side wall of thesecond gate structure, wherein a side wall of the first gate structuredisposed on the first device isolation film forms a first angle with anupper surface of the substrate, a side wall of the second gate structuredisposed on the second device isolation film forms a second angle withan upper surface of the substrate, the second angle is greater than thefirst angle, and a difference between the second angle and the firstangle is in a range from 3 degrees to 8 degrees.

According to an aspect of the present inventive concept, A semiconductordevice includes an active fin extended in a first direction on asubstrate, a device isolation film disposed on the substrate whilecovering a lower portion of the active fin, a gate structure extended ina second direction, intersecting the first direction while covering theactive fin and the device isolation film, and a gate spacer disposed ona side wall of the gate structure, wherein an inner side wall of thegate spacer disposed on the device isolation film is disposed to beadjacent to the gate structure, and is inclined at a uniform inclinationfrom a point higher than half of a height of the gate spacer to a bottomof the gate spacer while forming an acute angle with a bottom surface ofthe gate spacer, and an outer side wall of the gate spacer disposed onthe device isolation film and an upper surface of the substrate aresubstantially at a right angle to each other.

BRIEF DESCRIPTION OF DRAWINGS

The above and other aspects, features and other advantages of thepresent inventive concept will be more clearly understood from thefollowing detailed description, taken in conjunction with theaccompanying drawings, in which:

FIG. 1 is a plan view illustrating a semiconductor device according toan example embodiment;

FIGS. 2 through 4 are cross-sectional views illustrating a semiconductordevice according to an example embodiment;

FIGS. 5 and 6 are cross-sectional views illustrating a semiconductordevice according to an example embodiment;

FIGS. 7 and 8 are cross-sectional views illustrating a semiconductordevice according to an example embodiment;

FIG. 9 is a plan view illustrating a semiconductor device according toan example embodiment;

FIGS. 10 and 11 are cross-sectional views illustrating a semiconductordevice according to an example embodiment;

FIGS. 12 and 13 are cross-sectional views illustrating a semiconductordevice according to an example embodiment;

FIGS. 14 through 30 are cross-sectional views illustrating a method ofmanufacturing a semiconductor device according to an example embodiment;and

FIG. 31 is a block diagram illustrating an electronic device accordingto an example embodiment.

DETAILED DESCRIPTION

Embodiments of the present inventive concept will now be described indetail with reference to the accompanying drawings.

FIG. 1 is a plan view illustrating a semiconductor device according toan example embodiment.

With reference to FIG. 1, in a semiconductor device according to anexample embodiment, a plurality of active fins 105 may be disposed on asubstrate, and a device isolation film 107 may be disposed between theplurality of active fins 105. A plurality of gate structures 140intersecting the plurality of active fins 105 may be included therein.The plurality of gate structures 140 may be disposed on the deviceisolation film 107. The plurality of active fins 105 may be extended,for example, in a first direction (e.g., an X-axis direction). Theplurality of gate structures 140 may also be extended, for example, in asecond direction (e.g., a Y-axis direction). Gate spacers 150 may bedisposed on side walls of the plurality of gate structures 140.Source/drain regions may be disposed on both sides of the plurality ofgate structures 140.

FIGS. 2 through 4 are cross-sectional views illustrating a semiconductordevice according to an example embodiment. FIG. 2 is a cross-sectionalview along line I-I′ of FIG. 1, FIG. 3 is a cross-sectional view alongline II-II′ of FIG. 1, and FIG. 4 is a cross-sectional view along lineIII-III′ of FIG. 1.

With reference to FIGS. 2 through 4, a semiconductor device according toan example embodiment may include active fins 105 extending in the firstdirection on a substrate 101, the device isolation film 107 disposed onthe substrate 101 and covering a portion of a side surface of the activefins 105, a gate structure 140 extending in a second direction,intersecting the first direction on the active fins 105 and the deviceisolation film 107, and the gate spacers 150 disposed on side walls ofthe gate structure 140. For example, the first direction issubstantially perpendicular with respect to the second direction.

The substrate 101 may include a semiconductor material, for example, agroup IV semiconductor, a group III-V compound semiconductor, or a groupII-VI compound semiconductor. For example, the substrate 101 may be asemiconductor substrate such as silicon, germanium, silicon-germanium,or the like, a silicon on insulator (SOI) substrate, or a germanium oninsulator (GeOI) substrate. The active fins 105 may protrude from thesubstrate 101. The active fins 105 may be a portion of the substrate101.

The gate structure 140 disposed on an active fin 105 may have a width ofa lower portion narrower than a width of an upper portion. A side wallof the gate structure 140 disposed on the active fin 105 may be inclinedat a uniform inclination from at least a point higher than a half of aheight of the gate structure 140 to a bottom of the gate structure 140.The gate structure 140 disposed on the active fin 105 may have aninverted trapezoidal cross section. A side wall of the gate structure140 disposed on the active fin 105 may form a first angle θ1 withrespect to an upper surface of the substrate 101. The first angle θ1 maybe an acute angle. In FIG. 2, as an upper surface of the active fin 105is parallel to an upper surface of the substrate 101, the first angle θ1is indicated by an angle formed by an upper surface of the active fin105 and a side wall of the gate structure 140 for convenience ofunderstanding. When an upper surface of the substrate 101 is parallel toa bottom surface of the gate structure 140, a side wall of the gatestructure 140 disposed on the active fin 105 may form the first angle θ1with a virtual plane extended from a bottom surface of the gatestructure 140. The first angle θ1 may have a value of 80 degrees or moreand 90 degrees or less. In an embodiment, the first angle θ1 may have avalue of 83 degrees or more and 87 degrees or less.

Respective gate spacers 150 disposed on the active fins 105 may have awidth (or a thickness) changed in a direction perpendicular to an uppersurface of the substrate 101. The gate spacers 150 may have a firstwidth T1 (or a thickness) at an upper end of a gate structure 140, andthe gate spacers 150 may have a second width T2 (or a thickness) at alower end in contact with the active fin 105. The second width T2 (or athickness) may be greater than the first width T1 (or a thickness).Widths of the gate spacers 150 may increase toward an upper surface ofthe substrate. A gate spacer 150 disposed on the active fin 105 may havea first side wall (an inner side wall) and a second side wall (an outerside wall) opposing each other. The first side wall (an inner sidewall), adjacent to a side wall of the gate structure 140, is inclined ata uniform inclination with respect to an upper surface of the substrate101, and may form an acute angle with a bottom surface of the gatespacer 150. The acute angle may be substantially the same as the firstangle θ1. For example, the acute angle may have a value of 83 degrees ormore and 87 degrees or less. The second side wall (an outer side wall)and an upper surface of the substrate 101 are substantially at rightangles to one another. In an embodiment, the second side wall may forman angle in a range from 89 degrees to 91 degrees with respect to anupper surface of the substrate 101. The gate spacer 150, disposed on theactive fin 105, may have a trapezoidal cross section.

The gate structure 140, disposed on the device isolation film 107, mayhave a width of a lower portion narrower than a width of an upperportion. A side wall of the gate structure 140 disposed on the deviceisolation film 107 may be inclined at a uniform inclination from atleast a point higher than a half of a height the gate structure 140 to abottom of the gate structure 140. The gate structure 140 disposed on thedevice isolation film 107 may have an inverted trapezoidal crosssection. A side wall of the gate structure 140 disposed on the deviceisolation film 107 may include a portion forming a second angle θ3 withan upper surface of the substrate 101. The second angle θ3 may be anacute angle. In FIG. 3, as an upper surface of the device isolation film107 is parallel to an upper surface of the substrate 101, the secondangle θ3 is indicated by an angle formed by an upper surface of thedevice isolation film 107 and a side wall of the gate structure 140 forconvenience of understanding. When an upper surface of the substrate 101is parallel to a bottom surface of the gate structure 140 disposed onthe device isolation film 107, a side wall of the gate structure 140disposed on the active fin 105 may form the second angle θ3, with avirtual plane extended from a bottom surface of the gate structure 140.The second angle θ3 may have a value of 80 degrees or more and less than90. Specifically, the second angle θ3 may have a value of 83 degrees ormore and 87 degrees or less. The first angle θ1 may be the same as thesecond angle θ3.

Respective gate spacers 150 disposed on the device isolation film 107may have widths (or thicknesses) changed in a direction perpendicular toan upper surface of the substrate 101. The gate spacers 150 may have afirst width T1 (or a thickness) at an upper end of the gate structure140, and the gate spacers 150 may have a third width T3 (or a thickness)at a lower end in contact with the device isolation film 107. A thirdwidth T3 (or a thickness) may be greater than the first width T1 (or athickness). The third width T3 (or a thickness) may be greater than thesecond width T2 (or a thickness). Widths of the gate spacers 150disposed on the device isolation film 107 may increase toward to anupper surface of the substrate 101, and may be the widest in a portionin contact with the device isolation film 107. The gate spacer 150disposed on the device isolation film 107 may have a first side wall (aninner side wall) and a second side wall (an outer side wall) opposingeach other. The first side wall (an inner side wall), adjacent to a sidewall of the gate structure 140, is inclined at a uniform inclinationwith respect to an upper surface of the substrate 101, and may form anacute angle with a bottom surface of the gate spacer 150. The acuteangle may be substantially the same as the second angle θ3. For example,the acute angle may have a value of 83 degrees or more and 87 degrees orless. The second side wall (an outer side wall) and an upper surface ofthe substrate 101 are substantially at a right angle to one another. Insome cases, the second side wall may form an angle in a range from 89degrees to 91 degrees with respect to an upper surface of the substrate101. The gate spacer 150 disposed on the device isolation film 107 mayhave a trapezoidal cross section.

The gate spacers 150 may include silicon oxide, silicon nitride, siliconoxynitride (SiON), silicon oxide containing carbon (SiOC), siliconoxynitride containing carbon (SiOCN), silicon nitride containing carbonand boron (SiBCN), or combinations thereof.

The gate structure 140 may include an interfacial insulating layer 141,a gate insulating layer 142, a first gate electrode layer 145, and asecond gate electrode layer 147. The interfacial insulating layer 141may be disposed between the active fin 105 and the gate insulating layer142. The first gate electrode layer 145 and the second gate electrodelayer 147 may form a gate electrode layer.

The gate insulating layer 142 may conformally cover an inner side wallof the gate spacer 150 and an upper surface of the active fin 105 on theactive fin 105. The gate insulating layer 142 may conformally cover aninner side wall of the gate spacer 150 and an upper surface of thedevice isolation film 107 on the device isolation film 107. The firstgate electrode layer 145 may conformally cover the gate insulating layer142. The second gate electrode layer 147 may be formed on the first gateelectrode layer 145.

The interfacial insulating layer 141 may include silicon oxide, and thegate insulating layer 143 may include a high-k insulating material. Thehigh-k insulating material may refer to a dielectric material having adielectric constant higher than that of silicon oxide. The high-kinsulating material may include, for example, aluminum oxide (Al2O3),tantalum oxide (Ta2O3), titanium oxide (TiO2), yttrium oxide (Y2O3),zirconium oxide (ZrO2), zirconium silicon oxide (ZrSixOy), hafnium oxide(HfO2), hafnium silicon oxide (HfSixOy), lanthanum oxide (La2O3),lanthanum aluminum oxide (LaAlxOy), lanthanum hafnium oxide (LaHfxOy),hafnium aluminum oxide (HfAlxOy), or praseodymium oxide (Pr2O3).

The first gate electrode layer 145 may include, for example, at leastone selected from the group consisting of titanium nitride (TiN),tantalum nitride (TaN), tungsten nitride (WN), titanium aluminum nitride(TiAlN), titanium aluminum (TiAl), tantalum carbide (TaC), and titaniumcarbide (TiC). The second gate electrode layer 147 may include, forexample, a metallic material such as aluminum (Al), tungsten (W), ormolybdenum (Mo), or a semiconductor material such as doped polysilicon.

The semiconductor device may include source/drain regions 110 disposedon both sides of gate structures 140. The source/drain regions 110 mayhave portions connected to each other or merged with each other betweenthe active fins 105 adjacent to each other, and a void S may be formedbetween a merged portion and the device isolation film 107. As describedabove, a side wall of the gate structure 140, disposed to be adjacent tothe void on the device isolation film 107, may include a portion formingthe second angle θ3 with an upper surface of the substrate 101.

The source/drain regions 110 may be formed of, for example, silicon orsilicon-carbon (SiC) doped at a high concentration of an n-typeimpurity. Alternatively, the source/drain regions 110 may be formed ofsilicon-germanium (SiGe) doped at a high concentration of a p-typeimpurity.

The semiconductor device may include an etch stop layer 165 covering aside wall of the gate spacer 150 and an upper surface of thesource/drain regions 110, and may include a first interlayer insulatinglayer 170 disposed on the etch stop layer 165. In addition, thesemiconductor device may include a second interlayer insulating layer180, covering the first interlayer insulating layer 170 and the gatestructure 140.

The etch stop layer 165 may include silicon nitride, and the firstinterlayer insulating layer 170 and the second interlayer insulatinglayer 180 may include silicon oxide.

According to an example embodiment, widths of the gate spacers 150,adjacent to the device isolation film 107, are formed to be thick, sothat an electrical short failure between gate electrode layers includingthe first gate electrode layer 145 and the second gate electrode layer147 and a source/drain region 110, can be prevented.

FIGS. 5 and 6 are cross-sectional views illustrating a semiconductordevice according to an example embodiment. FIG. 5 is a cross-sectionalview cut along line I-I′ of FIG. 1, and FIG. 6 is a cross-sectional viewcut along line II-II′ of FIG. 1.

With reference to FIGS. 5 and 6, a semiconductor device according to anexample embodiment may include active fins 105 extended in a firstdirection on a substrate 101, a device isolation film 107 disposed onthe substrate 101 while covering a portion of a side surface of theactive fins 105, a gate structure 140 extended in a second directionintersecting the first direction on the active fins 105 and the deviceisolation film 107, and gate spacers 150′ disposed on a side wall of thegate structure 140.

Each of the gate spacers 150′ may include a first spacer 151 adjacent tothe gate structure 140, and a second spacer 153, disposed on an outerside wall of the first spacer 151.

The first spacer 151 has a structure bent at a boundary of the gatestructure 140 and the active fin 105, and a width of the second spacer153 may increase toward the active fin 105.

The first spacer 151 has a structure bent at a boundary of the gatestructure 140 and the device isolation film 107, and a width of thesecond spacer 153 may increase toward the device isolation film 107.

An angle in which the first spacer 151 is bent may have a value of 83degrees or more and 87 degrees or less.

The first spacer 151 and the second spacer 153 may include silicon oxide(SiOx), silicon nitride (SixNy), silicon oxynitride (SiON), siliconoxide containing carbon (SiOC), silicon oxynitride containing carbon(SiOCN), silicon nitride containing carbon and boron (SiBCN), orcombinations thereof.

FIGS. 7 and 8 are cross-sectional views illustrating a semiconductordevice according to an example embodiment. FIG. 7 is a cross-sectionalview cut along line I-I′ of FIG. 1, and FIG. 8 is a cross-sectional viewcut along line II-II′ of FIG. 1.

Each of gate spacers 150″ may include a first spacer 152 adjacent to thegate structure 140, and a second spacer 154 disposed on an outer sidewall of the first spacer 152.

A width of the first spacer 152 disposed on the active fin 105 mayincrease toward the active fin 105, and a width of the second spacer 154may be uniform.

A width of the first spacer 152 disposed on the device isolation film107 may increase toward the device isolation film 107, and a width ofthe second spacer 154 may be uniform.

An inner side wall of the first spacer 152 is inclined at a uniforminclination with respect to an upper surface of the substrate and mayform an acute angle with an upper surface of the substrate 101. Theacute angle may have a value of 83 degrees or more and 87 degrees orless.

The first spacer 152 and the second spacer 154 may include silicon oxide(SiOx), silicon nitride (SixNy), silicon oxynitride (SiON), siliconoxide containing carbon (SiOC), silicon oxynitride containing carbon(SiOCN), silicon nitride containing carbon and boron (SiBCN), orcombinations thereof.

FIG. 9 is a plan view illustrating a semiconductor device according toan example embodiment.

With reference to FIG. 9, in the case of a semiconductor deviceaccording to an example embodiment, a plurality of first active fins 105may be disposed on a first region I of a substrate, and a first deviceisolation film 107 may be disposed between the plurality of first activefins 105. A plurality of first gate structures 140, formed to intersectthe plurality of first active fins 105, may be included therein. Theplurality of first gate structures 140 may be disposed on the firstdevice isolation film 107. The plurality of first active fins 105 may beextended, for example, in a first direction (an X-axis direction). Theplurality of first gate structures 140 may also be extended, forexample, in a second direction (a Y-axis direction).

First gate spacers 150 may be disposed on a side wall of the pluralityof first gate structures 140. First source/drain regions (not shown) maybe disposed on both sides of the plurality of first gate structures 140.

A plurality of second active fins 205 may be disposed on a second regionII of the substrate, and a second device isolation film 207 may bedisposed between the plurality of second active fins 205. A plurality ofsecond gate structures 240, formed to intersect the plurality of secondactive fins 205, may be included therein. The plurality of second gatestructures 240 may be disposed on the second device isolation film 207.The plurality of second active fins 205 may be extended, for example, ina first direction (an X-axis direction). The plurality of second gatestructures 240 may be extended, for example, in a second direction (aY-axis direction). Second gate spacers 250 may be disposed on a sidewall of the plurality of second gate structures 240. Second source/drainregions may be disposed in both sides of the plurality of second gatestructures 240.

FIGS. 10 and 11 are cross-sectional views illustrating a semiconductordevice according to an example embodiment. FIG. 10 is a cross-sectionalview cut along line I-I′ of FIG. 9, and FIG. 11 is a cross-sectionalview cut along line II-II′ of FIG. 9. Transistors disposed in the firstregion I of the semiconductor device illustrated in FIGS. 10 and 11, arethe same those illustrated in FIGS. 2 and 3.

With reference to FIGS. 10 and 11, a substrate 101 may include a firstregion I and a second region II. First transistors disposed in the firstregion I of the substrate 101 may be, for example, an n-type Fin FieldEffect Transistor (FinFET), and second transistors disposed in thesecond region II of the substrate 101 may be, for example, a p-type FinField Effect Transistor (FinFET). Alternatively, first transistorsdisposed in the first region I of the substrate 101 may be, for example,a p-type FinFET, and second transistors disposed in the second region IIof the substrate 101 may be, for example, an n-type FinFET.

The semiconductor device may include first active fins 105, disposed onthe first region I of the substrate 101, a first device isolation film107 covering a lower portion of the first active fins 105, a first gatestructure 140 disposed on the first active fins 105 and the first deviceisolation film 107, first gate spacers 150 disposed on a side wall ofthe first gate structure 140, second active fins 205 disposed on thesecond region II of the substrate 101, a second device isolation film207 covering a lower portion of the second active fins 205, a secondgate structure 240 disposed on the second active fins 205 and the seconddevice isolation film 207, and second gate spacers 250 disposed on aside wall of the second gate structure 240. A side wall of the firstgate structure 140 disposed on a first active fin 105 may form a firstangle θa1 with an upper surface of the substrate 101, and a side wall ofthe second gate structure 240 disposed on a second active fin 205 formsa third angle θb1 with an upper surface of the substrate 101. The firstangle θa1 may be an acute angle, and may have a value of 80 degrees ormore or less than 90 degrees. In an embodiment, the first angle θa1 mayhave a value of 83 degrees or more and 87 degrees or less. The thirdangle θb1 may have a value from 89 degrees to 91 degrees. A side wall ofthe first gate structure 140 disposed on the first device isolation film107 may form a second angle θa3 with an upper surface of the substrate101, and a side wall of the second gate structure 240 disposed on thesecond device isolation film 207 may form a fourth angle θb3 with anupper surface of the substrate 101. A side wall of the first gatestructure 140, disposed on the first device isolation film 107, may forma second angle θa3 with an upper surface of the substrate 101, and aside wall of the second gate structure 240, disposed on the seconddevice isolation film 207, may form a fourth angle θb3 with an uppersurface of the substrate 101. The second angle θa3 may be an acuteangle, and may have a value of 80 degrees or more and less than 90degrees. In an embodiment, the second angle θa3 may have a value of 83degrees or more and 87 degrees or less. The fourth angle θb3 may have avalue from 89 degrees to 91 degrees. A difference between the fourthangle θb3 and the second angle θa3 may be in a range from 3 degrees to 8degrees. A difference between the fourth angle θb3 and the second angleθa3 may preferably be in a range from 4 degrees to 7 degrees.

Each of the first gate spacers 150 has a width which increases toward anupper surface of the substrate 101, and each of the second gate spacers250 may have a uniform width. In the case of the first gate spacers 150,a first width Ta1 at an upper end of a gate structure 104 may be thesmallest, and a third width Ta3 at a lower end in contact with thedevice isolation film 107 may be the largest. In the case of the secondgate spacers 250, a first width Tb1, a second width Tb2, and a thirdwidth Tb3 may be substantially the same. The first width Tb1 of thesecond gate spacers 250 may be thicker than the first width Ta1 of thefirst gate spacers 150.

FIGS. 12 and 13 are cross-sectional views illustrating a semiconductordevice according to an example embodiment. Transistors disposed in afirst region I of the semiconductor device illustrated in FIGS. 12 and13 have the same structure as the transistors illustrated in FIGS. 2 and3, while transistors disposed in a second region II have the samestructure as the transistors illustrated in FIGS. 10 and 11.

With reference to FIGS. 12 and 13, a substrate 101 may include the firstregion I, the second region II, and the third region III.

The semiconductor device may include third active fins 305 disposed onthe third region III of the substrate 101, a third device isolation film307 covering a lower portion of the third active fins 305, a third gatestructure 340 disposed on the third active fins 305 and the third deviceisolation film 307, and third gate spacers 350 disposed on a side wallof the third gate structure 340.

A side wall of the third gate structure 340 disposed on a third activefin 305 may form a fifth angle θc1 with an upper surface of thesubstrate 101. The fifth angle θc1 may have a range from 89 degrees to91 degrees.

A side wall of the third gate structure 340 disposed on the third deviceisolation film 307 may include a lower region forming a sixth angle θc3with an upper surface of the substrate 101. In the third gate structure340, a width of a lower portion may be wider than a width of an upperportion. The third gate structure 340 may include an upper region havinga uniform width, and the lower region in which a width graduallyincreases.

The sixth angle θc3 may be greater than the fourth angle θb3, may be anobtuse angle, and may be greater than 90 degrees and less than 100degrees.

A third gate spacer 350 may have a shape in which a width of a lowerportion is smaller than a width of an upper portion. The third gatespacer 350 may include an upper region having a uniform width and alower region in which a width gradually increases.

In an example embodiment, the semiconductor device does not have atransistor structure disposed in the second region II, and may have atransistor structure illustrated in the first region I and a transistorstructure illustrated in the third region III.

FIGS. 14 through 30 are cross-sectional views illustrating a method ofmanufacturing a semiconductor device according to an example embodiment.FIGS. 14, 17, 20, 23, 26, and 29 are cross-sectional views correspondingto FIG. 2. FIGS. 15, 18, 21, 24, 27, and 30 are cross-sectional viewscorresponding to FIG. 3. FIGS. 16, 19, 22, 25, and 28 arecross-sectional views corresponding to FIG. 4.

With reference to FIGS. 14 through 16, active fins 105 and a deviceisolation film 107 are formed on a substrate 101, and a sacrificial gateinsulating layer 132 a and a sacrificial gate electrode layer 135 a maybe formed thereon. Further, a gate mask pattern 136 may be formed on thesacrificial gate electrode layer 135 a.

The substrate 101 may include a single crystal semiconductor substrate,such as a silicon wafer or a silicon on insulator (SOI) wafer. Thesubstrate 101 may include a group IV-IV compound semiconductor, a groupIII-V compound semiconductor, or a group II-VI compound semiconductor.

Mask patterns are formed on the substrate 101, and the mask patterns areused as an etching mask to etch the substrate 101, so that the activefins 105 may be formed. In an etching process described above, trenchesmay be formed between the active fins 105. The trenches may include deeptrenches (not shown) and shallow trenches. The active fins 105 may beformed on the substrate 101 in parallel to each other. The active fins105 may be extended in a first direction (for example, an X-axisdirection). The active fins 105 may be a portion of the substrate 101.

A lower portion of the shallow trenches are embedded with an insulatingmaterial, so the device isolation film 107 may be formed. As a result,an upper portion of the active fins 105 may protrude above the deviceisolation film 107. The device isolation film 107 may fill a portion ofthe shallow trenches, and may cover a portion of a side surface of theactive fins 105. The deep trenches may be completely filled with thedevice isolation film 107. In FIG.16, an upper surface of the deviceisolation film 107 is illustrated as flat, but the upper surface of thedevice isolation film 107 may have a concave shape.

After the sacrificial gate insulating layer 132 a covering the activefins 105 and the sacrificial gate electrode layer 135 a are sequentiallyformed, gate mask patterns 136 may be formed on the sacrificial gateelectrode layer 135 a. In this case, an anisotropic etching process offorming the gate mask patterns 136 may include a main etch process andan overetch process, and the overetch process may be performed to allowan upper surface of the sacrificial gate electrode layer 135 a to beetched to a depth D of 3 nm or less. The overetch process is reduced toallow the upper surface thereof to be etched to the depth D of 3 nm orless, so a width of an upper portion of a sacrificial gate may beincreased in a subsequent etching process of a sacrificial gate pattern.A width of the gate mask patterns 136 in a first direction (for example,an X-axis direction) may be in a range from 21 nm to 24 nm. The gatemask patterns 136 may be extended in a second direction (for example, aY-axis direction). The sacrificial gate insulating layer 132 a may beformed in an oxidation process, and the sacrificial gate insulatinglayer 132 a may be formed on only surfaces of the active fins 105protruding above the device isolation film 107. Alternatively, thesacrificial gate insulating layer 132 a may be formed in a chemicalvapor deposition (CVD) or an atomic layer deposition (ALD) process, andthe sacrificial gate insulating layer 132 a may be formed on surfaces ofthe active fins 105 and the device isolation film 107. For example, thesacrificial gate insulating layer 132 a may include silicon oxide, andthe sacrificial gate electrode layer 135 a may include polysilicon. Thegate mask patterns 136 may include silicon nitride. In FIG. 16, edges ofan upper portion of the active fins 105 are illustrated as having anangular shape, but the edges of an upper portion thereof may be curved.

With reference to FIGS. 17 through 19, the gate mask patterns 136 areused as an etching mask to anisotropically etch the sacrificial gateelectrode layer 135 a and the sacrificial gate insulating layer 132 a,so that sacrificial gate patterns 135 and sacrificial gate insulatingpatterns 132 may be formed. The sacrificial gate patterns 135 may beextended in the second direction while covering the active fins 105 andthe device isolation film 107. The sacrificial gate insulating layer 132a may be completely removed from the active fins 105, between thesacrificial gate patterns 135. Alternatively, the sacrificial gateinsulating layer 132 a may remain on the active fins 105 between thesacrificial gate patterns 135.

The anisotropic etching process of forming a sacrificial gate pattern135 and a sacrificial gate insulating pattern 132 may be performed at asubstrate temperature of 40° C. to 80° C., more preferably at asubstrate temperature of 50° C. to 70° C. As an etching process isperformed at a substrate temperature in a range described above, bothside walls of the sacrificial gate pattern 135 disposed on the activefin 105 may form an acute angle θ1 with an upper surface of thesubstrate 101. As illustrated in FIG. 13, when an upper surface of theactive fins 105 is parallel to an upper surface of the substrate 101,both side walls may form the acute angle θ1 with an upper surface of theactive fins 105. As an etching process is performed at a substratetemperature in the range described above, both side walls of thesacrificial gate pattern 135 disposed on the device isolation film 107may form an acute angle θ3 with an upper surface of the substrate 101.As illustrated in FIG. 14, when an upper surface of the device isolationfilm 107 is parallel to an upper surface of the substrate 101, both sidewalls may form the acute angle θ3 with an upper surface of the deviceisolation film 107. For example, acute angle θ1 and acute angle θ3 maybe the same, and may have a range of 80 degrees or more and less than 90degrees. The sacrificial gate patterns 135 may have an invertedtrapezoidal cross section in which a width of a lower portion isnarrower than a width of an upper portion.

With reference to FIGS. 20 through 22, gate spacers 150 may be formed onboth side walls of the sacrificial gate patterns 135, and recess regionsR may be formed on the active fins 105 on both sides of the sacrificialgate patterns 135. Fin spacers 152 may be formed on both sides of therecess regions R of the active fins 105.

A process of forming the gate spacers 150 and the fin spacers 152 mayinclude a process in which a spacer material layer is formed to coverthe active fins 105 between the sacrificial gate patterns 135 and thedevice isolation film 107, and to cover the gate mask patterns 136 andthe sacrificial gate patterns 135, and the spacer material layer isanisotropically etched thereafter. The spacer material layer may includesilicon oxide (SiOx), silicon nitride (SixNy), silicon oxynitride(SiON), silicon oxide containing carbon (SiOC), silicon oxynitridecontaining carbon (SiOCN), silicon nitride containing carbon and boron(SiBCN), or combinations thereof. The spacer material layer may beformed by performing an atomic layer deposition (ALD) process.

The gate spacers 150 disposed on the active fins 105 and the deviceisolation film 107 may have widths which increase in a directionperpendicular to an upper surface of the substrate 101. The gate spacers150 may have widths which increase toward an upper surface of thesubstrate 101. The gate spacers 150 disposed on the active fins 105 mayhave widths which increase toward an upper surface of the active fins105. The gate spacers 150 disposed on the device isolation film 107 mayhave widths which increase toward an upper surface of the deviceisolation film 107. The gate spacers 150 may have the largest width in aportion in which the gate spacers are in contact with the deviceisolation film 107. A first side wall of gate spacers 150, in contactwith the sacrificial gate patterns 135, may have a portion inclined withrespect to an upper surface of the substrate 101, and a second side wallof gate spacers 150, located opposite the first side wall, may have aportion perpendicular to an upper surface of the substrate 101. The gatespacers 150 may have a pointed upper portion in a region adjacent to thegate mask patterns 136.

The gate spacers 150 and the gate mask pattern 136 are used as anetching mask to remove a portion of the active fins 105, so that therecess regions R may be formed. A lower surface of the recess regions Rformed in the active fins 105 may be lower than an upper surface of thedevice isolation film 107. In an embodiment, a lower surface of therecess regions R formed in the active fins 105 may be formed at a levelthe same height as or higher than that of an upper surface of the deviceisolation film 107.

Unlike the recess regions illustrated in the drawing, the recess regionsR may have a shape extended below the gate spacer 150. To this end, anisotropic dry or wet etching process may be further performed.

With reference to FIGS. 23 through 25, the source/drain region 110 maybe formed in a recess region R.

First, a precleaning process for a Selective Epitaxial Growth (SEG)process with respect to the recess regions R may be performed. Theprecleaning process may be performed in a wet cleaning process, a drycleaning process, or combinations thereof. The wet cleaning process mayinclude an isotropic wet etching process using a diluted hydrofluoricacid (HF) or buffered oxide etch (BOE) solution. The dry cleaningprocess may include an isotropic dry etching process (for example,Siconi™) using an ammonia (NH3) and nitron fluorine three (NF3) gas, orthe like. Next, the SEG process is used to grow epitaxial layers filingthe recess regions R, so the source/drain regions 110 may be formed. Anupper surface of the source/drain regions 110 may be formed in aposition higher than an upper surface of the active fins 105. However, aposition of the upper surface of the source/drain regions 110 is notlimited to what is illustrated. The source/drain regions 110 may be, forexample, a silicon (Si) layer or silicon-carbon (SiC) layer doped withan n-type impurity. Alternatively, the source/drain regions 110 may be asilicon-germanium (SiGe) layer containing a p-type impurity. Thesource/drain regions 110 may be merged with each other on the activefins 105 adjacent to each other. A void S may be formed between aportion, in which the source/drain regions 110 are merged, and thedevice isolation film 107.

With reference to FIG. 24, in a cross section cut on the deviceisolation film 107 in the first direction in which the active fins 105are extended, the void S may be sealed by the source/drain region 110,the gate spacers 150, and the device isolation film 107. A width of thegate spacers 150 adjacent to the device isolation film 107 below thevoid S is thick, so an electrical short failure between a gate electrodeformed subsequently and the source/drain region 110 can be prevented.

With reference to FIGS. 26 through 28, the etch stop layer 165 is formedon the substrate 101, and the first interlayer insulating layer 170exposing the sacrificial gate patterns 135 may be formed on the etchstop layer 165.

The gate mask pattern 136, the sacrificial gate pattern 135, the gatespacer 150, and the etch stop layer 165, with a uniform thicknesscovering the source/drain regions 110, may be formed. The etch stoplayer 165 may be formed on the device isolation film 107. The etch stoplayer 165 may include silicon nitride. Etch stop layers 165 may beformed in a chemical vapor deposition process or atomic layer depositionprocess.

After an insulating material layer is formed on the etch stop layer 165,a planarization process is performed to expose a sacrificial gateelectrode, so that the first interlayer insulating layer 170 may beformed. In the planarization process, an upper region of the gatespacers 150 may be removed together. An upper end of the gate spacers150 has a first width T1, gate spacers 150 in contact with the activefins 105 has a second width T2, and gate spacers 150 in contact with thedevice isolation film 107 has a third width T3. Among first throughthird widths T1, T2, and T3, the third width T3 is the largest, and thefirst width T1 is the smallest.

The first interlayer insulating layer 170 may includeboro-phospho-sililcate glass (BPSG), tonen silazene (TOSZ), undopedsilicate glass (USG), spin on glass (SOG), flowable oxide (FOX),tetra-ethyl-ortho-silicate (TEOS) or high density plasma-CVD (HDP-CVD)oxide, or the like. The first interlayer insulating layer 170 may beformed in a chemical vapor deposition process, a plasma enhanced-CVD(PE-CVD) process, a spin coating process, or an atomic layer depositionprocess.

With reference to FIGS. 29 and 30, the sacrificial gate patterns 135 andthe sacrificial gate insulating patterns 132 may be selectively removed.Thus, openings partially exposing the active fins 105 may be formed. Aprocess of removing the sacrificial gate patterns 135 and thesacrificial gate insulating patterns 132 may be either a dry etchingprocess or a wet etching process.

With reference to FIGS. 2 through 4, the interfacial insulating layer141, the gate insulating layer 143, the first gate electrode layer 145,and the second gate electrode layer 147 are sequentially formed insidethe openings, and a planarization process is performed, so that the gatestructure 140 may be formed. The interfacial insulating layer 141 maynot be formed on the device isolation film 107.

FIG. 31 is a block diagram illustrating an electronic device accordingto an example embodiment.

With reference to FIG. 31, an electronic device 2000 according to anexample embodiment may include a communication unit 2010, an input unit2020, an output unit 2030, a memory 2040, and a processor 2050.

The communication unit 2010 may include a wired/wireless communicationmodule, and may include a wireless Internet module, a localcommunication module, a GPS module, a mobile communication module, andthe like. The wired/wireless communication module included in thecommunication unit 2010 may be connected to an external communicationnetwork by various communication standards to transmit and receive data.The input unit 2020 is a module provided to control an operation of theelectronic device 2000 by a user, and may include a mechanical switch, atouch screen, a voice recognition module, and the like. In addition, theinput unit 2020 may include a mouse operated with a track ball or alaser pointer, or a finger mouse, and may further include various sensormodules for the user to input data. The output unit 2030 may outputinformation processed in the electronic device 2000 in the form of avoice or an image, and the memory 2040 may store a program forprocessing and controlling the processor 2050, data, or the like. Theprocessor 2050 may transfer a command to the memory 2040 according to arequired operation, so that data may be stored or retrieved. The memory2040 may be embedded in the electronic device 2000 or may communicatewith the processor 2050 through a separate interface. When the memorycommunicates with the processor 2050 through a separate interface, theprocessor 2050 may store or retrieve data in the memory 2040 throughvarious interface standards such as SD, SDHC, SDXC, MICRO SD, USB, orthe like. The processor 2050 may control an operation of each portionincluded in the electronic device 2000. The processor 2050 may performcontrolling and processing related to voice communication, videocommunication, data communication, or the like, or may performcontrolling and processing for multimedia playback and management. Inaddition, the processor 2050 may process input transmitted from a userthrough the input unit 2020 and may output a result through the outputunit 2030. In addition, as described previously, the processor 2050 maystore data required for controlling an operation of the electronicdevice 2000 in the memory 2040 or may retrieve data from the memory2040. At least one of the processor 2050 and the memory 2040 may includea semiconductor device according to various example embodiments, asdescribed previously.

As set forth above, according to example embodiments of the presentinventive concept, a width of a lower portion of a gate spacer disposedon a side wall of a gate structure on a device isolation film is formedto be thick, so that a semiconductor device having excellent electricalproperties and a method of manufacturing the same may be provided.

While example embodiments have been shown and described above, it willbe apparent to those skilled in the art that modifications andvariations could be made without departing from the scope of the presentdisclosure, as defined by the appended claims.

What is claimed is:
 1. A semiconductor device, comprising: an active finextending in a first direction on a substrate; a device isolation filmdisposed on the substrate and covering a lower portion of the activefin; a gate structure extending in a second direction and covering theactive fin and the device isolation film, the second direction beingperpendicular with respect to the first direction; and a gate spacerdisposed on a side wall of the gate structure, wherein the gatestructure disposed on the device isolation film has upper and lowerportions, a width of the lower portion being narrower than a width ofthe upper portion; wherein a side wall of the gate structure disposed onthe device isolation film is inclined at a uniform inclination from apoint higher than a half of a height of the gate structure to a bottomof the gate structure; and wherein an inner side wall of the gate spacerdisposed on the device isolation film is disposed to be adjacent to thegate structure, and is inclined at a uniform inclination from a pointhigher than a half of a height of the gate spacer to a bottom of thegate spacer and forming an acute angle with respect to a bottom surfaceof the gate spacer.
 2. The semiconductor device of claim 1, wherein anouter side wall of the gate spacer disposed on the device isolation filmand an upper surface of the substrate are substantially at a right anglewith respect to each other.
 3. The semiconductor device of claim 1,wherein a width of the gate spacer increases toward an upper surface ofthe substrate, and wherein the width is widest at a portion in which thegate spacer is in contact with the device isolation film
 4. Thesemiconductor device of claim 3: wherein the gate spacer includes afirst spacer adjacent to the gate structure, and a second spacerdisposed on an outer side wall of the first spacer; and wherein thefirst spacer has a structure bent at a boundary of the gate structureand the device isolation film, and a width of the second spacerincreases toward the device isolation film.
 5. The semiconductor deviceof claim 3: wherein the gate spacer includes a first spacer adjacent tothe gate structure, and a second spacer disposed on an outer side wallof the first spacer; and wherein a width of the first spacer increasestoward the device isolation film, and a width of the second spacer issubstantially uniform.
 6. The semiconductor device of claim 1: whereinthe gate structure disposed on the device isolation film has an invertedtrapezoidal cross section; and wherein the gate spacer disposed on thedevice isolation film has a trapezoidal cross section.
 7. Thesemiconductor device of claim 1: wherein the gate structure disposed onthe active fin has upper and lower portions, a width of the lowerportion being narrower than a width of an upper portion; and wherein aside wall of the gate structure disposed on the active fin is inclinedwith a uniform inclination.
 8. The semiconductor device of claim 1:wherein the gate structure includes a gate insulating layer, a firstgate electrode layer, and a second gate electrode layer; and wherein thegate insulating layer includes a high-lc insulating material.
 9. Thesemiconductor device of claim 8: wherein the gate insulating layer onthe device isolation film conformally covers an inner side wall of thegate spacer and an upper surface of the device isolation film; andwherein the first gate electrode layer conformally covers the gateinsulating layer.
 10. A semiconductor device, comprising: a substrateincluding a first region and a second region; a first active findisposed on the first region of the substrate; a first device isolationfilm covering a lower portion of the first active fin; a first gatestructure disposed on the first active fin and the first deviceisolation film; a first gate spacer disposed on a side wall of the firstgate structure; a second active fin disposed on the second region of thesubstrate; a second device isolation film covering a lower portion ofthe second active fin; a second gate structure disposed on the secondactive fin and the second device isolation film; and a second gatespacer disposed on a side wall of the second gate structure, wherein aside wall of the first gate structure disposed on the first deviceisolation film forms a first angle with respect to an upper surface ofthe substrate; wherein a side wall of the second gate structure disposedon the second device isolation film forms a second angle with respect toan upper surface of the substrate, wherein the second angle is greaterthan the first angle; and wherein a difference between the second angleand the first angle is in a range from 3 degrees to 8 degrees.
 11. Thesemiconductor device of claim 10, wherein the difference between thesecond angle and the first angle is in a range from 4 degrees to 7degrees.
 12. The semiconductor device of claim 10: wherein the firstgate spacer has a width that increases toward an upper surface of thesubstrate; and wherein the second gate spacer has a uniform width. 13.The semiconductor device of claim 10: wherein the first gate spacer hasa first side wall and a second side wall opposing each other, and abottom surface located between the first side wall and the second sidewall; wherein the first side wall adjacent to a side wall of the firstgate structure forms an acute angle with respect to the bottom surface;and wherein the second side wall and the bottom surface aresubstantially at a right angle with respect to each other.
 14. Thesemiconductor device of claim 10, wherein the substrate further includesa third region and wherein the semiconductor device further comprises: athird active fin disposed on the third region of the substrate; a thirddevice isolation film covering a lower portion of the third active fin;a third gate structure disposed on the third active fin and the thirddevice isolation film; and a third gate spacer disposed on a side wallof the third gate structure, wherein a side wall of the third gatestructure disposed on the third device isolation film forms a thirdangle with respect to an upper surface of the substrate; and wherein thethird angle is greater than the second angle.
 15. The semiconductordevice of claim 14, wherein the third gate spacer has upper and lowerportions, a width of the lower portion narrower than a width of theupper portion.
 16. A semiconductor device comprising: an active finextended in a first direction on a substrate; a device isolation filmdisposed on the substrate and covering a lower portion of the activefin; a gate structure extended in a second direction and covering theactive fin and the device isolation film, the second direction beingperpendicular with respect to the first direction; and a gate spacerdisposed on a side wall of the gate structure, wherein an inner sidewall of the gate spacer disposed on the device isolation film isdisposed to be adjacent to the gate structure, and is inclined at auniform inclination from a point higher than half of a height of thegate spacer to a bottom of the gate spacer while forming an acute anglewith respect to a bottom surface of the gate spacer; and wherein anouter side wall of the gate spacer disposed on the device isolation filmand an upper surface of the substrate are substantially at a right anglewith respect to each other.
 17. The semiconductor device of claim 16,wherein a side wall of the gate structure disposed on the deviceisolation film is inclined at a uniform inclination from a point higherthan half of a height of the gate structure to a bottom of the gatestructure.
 18. The semiconductor device of claim 16, wherein a width ofa lower portion of the gate spacer disposed on the device isolation filmis narrower than a width of a lower portion of the gate spacer disposedon the active fin.
 19. The semiconductor device of claim 16: wherein thegate spacer includes a first spacer adjacent to the gate structure, anda second spacer disposed on an outer side wall of the first spacer; andwherein the first spacer has a structure bent at a boundary of the gatestructure and the device isolation film, and a width of the secondspacer increases toward the device isolation film.
 20. The semiconductordevice of claim 16: wherein the gate spacer includes a first spaceradjacent to the gate structure, and a second spacer disposed on an outerside wall of the first spacer; and wherein a width of the first spacerincreases toward the device isolation film, and a width of the secondspacer is uniform.